Photolithography and Applications in Nanotechnology

[Music]

[Laughter]

[Applause]

let’s think

big they said no on the contrary

let’s think small imagine a blueberry

and a strand of our hair

the difference in scale between the

width of that blueberry

and the diameter of that strand of hair

is the same difference in scale

between the diameter of that strand of

hair and the scale that i’ll be talking

about today

did you know that the world’s first

computer first digital computer

filled up a 30 by 50 foot room

probably but still look how far we’ve

come

pull out the average smartphone from

your pockets today and they fit snugly

into our hands

compact and convenient in fact

your phone could very well have been

fabricated with the so-called

seven nanometer process to put that into

perspective

if that seven nanometer mobile processor

was turned into a seven centimeter

diameter baseball

which is about the average size of a

baseball

the average 171 centimeter male

would become a giant with a height of

almost three times

the radius of the earth not to mention

today’s smartphone’s capabilities far

surpass

those of the world’s first computer

so the million dollar question

how on earth did we go from the world’s

first computer that spanned an entire

basement

to today’s hand-held smartphone

that still outperforms its ancestor

in other words how did we manage to get

these computers so dang small

while still stuffing even more functions

into it than the world’s first computer

ever had a partial answer to this

question

involves photolithography

but what is photolithography well i’ll

start with a simple explanation of

lithography

one of the ancestors of photolithography

if you will

lithography is an older process invented

in 1796

and it was a process that takes

advantage it is a process that takes

advantage of the fact that oil and water

don’t mix very well and

it was a process that was originally

intended for the reproduction of

sheet music so that one could write down

their sheet music once and then be able

to copy and reproduce it

first one would draw their desired

design or write their desired writing

onto a lithographic

grainy stone slab then by covering

the stone slab with solutions such as a

solution of gum arabic and nitric

acid and other solutions we can

selectively kind of

recreate images with lithography

especially like when you

place paper onto the stone slab when you

kind of

press down the paper onto its own slab

you can copy

all of the original designs by new

details because at that point

photography

is a process that can selectively

recreate images onto

a different mediums indefinitely

and it turns out that photo lithography

is rather similar to lithography

even if it doesn’t involve kind of uh

oil and water as

its main materials the key difference

between the two processes

lies in photolithography’s prefix photo

which means light and this new

involvement of light is rather analogous

to the solution of gum arabic and nitric

acid

used in lithography and so

photolithography

event was invented in 1952 by jay

lathrop and james nall

at the predecessor of today’s army

research laboratory

it was a solution as to how they could

better fit the necessary circuits

in the limited space available inside a

proximity fuse

and so photolithography is a process

that involves

the selective opening or closing of

the surface of a semiconductor typically

silicon

and this is quite similar to how we can

recreate selectively recreate

images using lithography

imagine cutting cake and instead of

cutting it

into eight uniform slices like doing

going with a conventional route

say you want to cut a square right from

the middle of the cake

you’d probably trace and cut the outline

first and then carefully remove it

leaving a square shaped hole in the

middle of the cake

this is essentially how photolithography

works but however

because it is very difficult for us to

try and cut a square out from a

piece of silicon wafer we leave it up to

something called a mask

to be your knife and uv light or

ultraviolet light

to be the mouth that ravedously consumes

the square piece of cake but you might

ask what is a mask

well a mask is something that contains

your design

in the form of negative space meaning

that if you shine a flashlight through

this mask onto a wall

you’ll get the opposite of a shadow

puppet or a light puppet

and that would be your design

and so instead of the wafer slowly being

eaten away

by the uv light exposure the mask helps

protect

all areas that you want to keep and the

uv light would only be able to pass

through the negative space

in the mask and so essentially the mask

helps block light where you don’t want

it to go alternatively treat the

silicone wafer

like the entire cake say you wanted to

eat the entire cake

but your mother says absolutely not and

restricts you limits you

so you can only eat the square piece of

cake in the middle in that case

your mother is what we would call the

mask in photolithography

and you would be the mouth that

ravenously consumes

the square piece of cake and with this

actually comes a crucial

step of the process a crucial material

called photoresist

which is something that we spread in a

uniform layer onto the silicon

wafer and this and it kind of acts as an

intermediate between the silicon wafer

and the uv light

and so there are two kinds of

photoresist one part being positive

and other being negative but we’ll stick

with positive

the positive photoresist helps carve

your design

in the form of negative space which is

exactly like how you

carve the square piece of cake from the

entire cake

another way of describing this

phenomenon is to say that

positive photoresist melts away or

clears wherever it is exposed to uv

light and of course i am oversimplifying

this process quite a bit

but it’s often valuable to see the

general picture before being bombarded

by specific details

so the general four-step process of

photolithography that you should at

least try to take away from today

is as follows one

surface treatment where you treat the

wafer to a multitude of materials that

drive out water

in order to encourage adhesion between

the silicone wafer and the photoresist

because photoresist is actually an

organic

material that does not like sticking to

water and so you’ll also probably heat

the silicone wafer on a hot plate at

about 100 degrees celsius or so

to dehydrate it even further two

spin coating we use spin coat

photoresist onto the wafer using a

device called a spin coater which

actually takes advantage of centrifugal

force which is

but in reality inertia to spread a

uniform

layer a uniform coating of photoresist

onto the silicon wafer

three exposure which involves

uv light to melt away certain areas of

photoresist

so that you can etch the silicon wafer

later because in reality

photolithography doesn’t actually etch

or kind of eat away

at the wafer itself instead it does that

with the photoresist

and so photolithography actually

prepares the silicon wafer

for a process called etching that

actually cuts away equal thickness of

the photoresist and the silicone wafer

to create the actual indent in the

silicon wafer

you’ll also probably want a long pass

filter on the mask

to avoid the t-topping which is a

phenomenon

where a t-shape forms due to due to

the diffraction and reflection of the uv

light causing too much photoresist to

clear out

four development where

you clean the wafer by drenching it in

various solutions to develop and clean

it washing away any excess photoresist

and actually this step involves a post

exposure bake

on the hot plate to watch to avoid

stress cracks due to

sudden changes in temperature and so

congratulations

all of this was to create your very own

master the equivalent of lithography

stone

slab a mold or template

that contains your circuit design and so

your silicon wafer can now transfer that

design

reproduce it just like how lithography

reproduces your grease drawing

so why photolithography what’s the point

of all these silicon wafers

well first off photolithography is much

much more efficient at producing circus

than trying to manually tweezer

resistors onto breadboards

and plus photo lithography lets us

create smaller and smaller devices

chips more specifically that almost

impossibly fit even more complexity

practicality and functionality

into onto their tiny compact surfaces

and so this is especially helpful for

creating

devices called mems devices or

microelectro

mechanical systems such as micro

sensors micro actuators micro

electronics and micro structures which

are small enough

for small squeeze and stack into tinier

and tinier spaces

it’s what allows apple to keep trying to

make their phones thinner

every year how about lab on a chip

an example of a mems device

lab on ship takes advantage of certain

fluids is exactly as its name suggests

it’s a system that involves multiple

laboratory techniques

onto a small chip only about a few

square centimeters or so

in size and so how does labana chip take

advantage of these different properties

of these certain fluids

well water at a microscale is actually

acts the same as honey ketchup and blood

does at a macro scale which is the skill

that we’re all used to living in in our

daily lives

and water at a macro scale actually acts

as a newtonian fluid

meaning that its viscosity is

not affected by stress and viscosity

being how easily a

fluid can flow however ketchup

honey and blood are all examples of

non-newtonian fluids

meaning that its viscosities are

affected by stress

and you can see this when you squeeze

ketchup out of a plastic ketchup bottle

how it comes out in a steady stream and

it almost acts

like water becoming more runnier

until it kind of starts sputtering of

course and water at a microscale

actually acts just like a non-newtonian

fluid

meaning that its viscosity is affected

by stress and so we can mix water

using a different technique than we

usually do we can mix water

with a process called diffusion where

water kind of moves from areas of higher

concentration to areas of lower

concentration

sort of like how the carbon dioxide we

breathe out diffuses

into the air and we can mix by diffusion

instead of

how we usually mix it in a process

called turbulence such as how we

vigorously stir

instant hot chocolate powder into hot

water to create hot chocolate

photo lithography actually has many

other applications as well

two photon lithography can create 3d

shapes and a micro

sometimes even nano scale

and so you can see this because

it literally almost lets us create an

entire new dimension of design and this

is actually a miniature statue of

liberty

being recreated using two photon

lithography and you can see the two

photons

right here and photo lithography can

also let us create proper biomimetic

designs

such as materials that mimic gecko ct or

the little bristles

that let lizards run up trees and walls

but what about further into the future

what potential

does this relatively new technique have

in our ever-changing world

well it’s worth noting that

photolithography stands at the root

of most nanotechnology it’s what allows

us to explore new ideas as

our capability to create smaller and

smaller devices

increases potential ideas still being

explored

include nano artery robots that can

clean clogged arteries

and inject medicinal drugs straight into

our bloodstream

skipping the process of external

injections

or how about nano-insulin pumps that can

be inserted into people diagnosed with

diabetes

and internally inject insulin avoiding

the current hassle

of external insulin pumps that are still

unwieldy devices

that you attach on your belt it’s a

world of endless possibility

given enough time patience and research

let’s take a look at bcis what what in

the world are bcis

a bci is an acronym for

brain computer interface and as the name

suggests it’s an interface that connects

a brain and a computer

they represent technologies designed to

communicate with the central nervous

system

such as the brain the spinal cord and

neural sensory retinol

depending on the design and intent of

this technology we can record and

interpret neural signals

designed to complete an internal neural

action

externally perhaps on a computer

and so if a patient has a disease or

trauma that inhibits their neural

functions

we can use a bci to assist their brains

and stimulate neural activity

combined with ai and machine learning to

other growing fields

photolithography can be used to create

smaller and smaller bcis

which can potentially significantly

augment their capabilities

and we would be able to use this

technology for generations to come

the point of this talk today was to

introduce you all to one of the

fundamental processes driving the

development of nanotechnology

one of the obstacles facing this field

however is the looming end to moore’s

law

which stated that every two or two years

or so we would be able to double the

number of transistors

on integrated circuits such shrinking in

size

not only led to faster operation speed

but also lower energy consumption of and

of course higher device density

which are all vanishing as moore’s law

is slowing down

the reason is that such shrinking is

reaching its physical limits

the amount of heat that the chips

generate doesn’t decrease

by the same proportions as we scale

these chips down

and it has become impossible for us to

try and cool them down fast enough

to gain the processing payoff that we

hope to see

such shrinking in size that shrinking a

device even further doesn’t result in

lower energy consumption either

and the number of defects are increasing

as we continually try to produce

smaller and smaller devices using our

current technology

to those of you still undecided on your

career paths maybe you can use this

information as a starting point

because as we graduate high school and

into college and beyond

we’ll be the ones in the labs and

classrooms looking for a way to overcome

this hurdle we’ll be the ones

looking forging solutions that will

allow us to better the world

even if the difference is microscopic

we’ll be the ones exploring the balance

of nanotechnology

leveraging processes like

photolithography adventuring into worlds

of ever decreasing scale

thank you

you

[音乐]

[笑声]

[掌声]

让我们从

大处

着眼他们说不

那根头发的直径

和我今天要谈论的比例之间的比例差异相同

你知道吗?世界上第一

台计算机第一台数字计算机

可能填满了一个 30 x 50 英尺的房间,但仍然看看我们有多远 今天

从口袋里拿出普通的智能手机

,它们紧紧地

放在我们的手中,

小巧方便,事实上

你的手机很可能是

用所谓的七纳米工艺制造的,

如果那个七纳米移动处理器的话

变成了一个直径为 7 厘米的

棒球

,大约是一个棒球的平均大小,

平均 171 厘米的男性

将变成一个身高

近 3 米的巨人 e 倍

于地球的半径,更不用说

今天的智能手机的功能远远

超过了世界上第一台计算机,

所以百万美元的问题

,我们到底是如何从世界上

第一台横跨整个地下室的计算机发展

到今天仍然存在的手持智能手机的?

胜过它的祖先

,换句话说,我们是如何设法让

这些计算机变得如此小巧,

同时仍然向其中

塞入比世界上第一台计算机更多的功能

对这个问题的部分答案

涉及光刻,

但我将

首先从光刻开始 光刻的简单解释

光刻

的祖先之一

光刻是 1796 年发明的较旧

的工艺,这是一个

利用油和水

不能很好混合的事实的工艺

这是一个最初

用于复制

乐谱的过程,以便人们可以写下

他们的乐谱一次,然后

能够复制和复制它,

首先将绘制他们想要的

设计或将他们想要的文字写

在光刻

颗粒石板上,然后用阿拉伯树胶和硝酸

溶液等溶液覆盖石板,

然后 其他解决方案,我们可以

选择性地

使用光刻技术重新创建图像,

特别是当您

将纸张放在石板上时,当您将

纸张按到自己的板上时,

您可以

通过新的细节复制所有原始设计,

因为此时

摄影

是 一种可以选择性地将

图像无限期地重新创建

到不同介质上的过程

,事实证明,光刻

与光刻非常相似,

即使它不涉及

油和水作为

其主要材料,

这两个过程之间的主要区别

在于 photolithography 的前缀

photo 表示光,这种新

的光参与与

胶的解决方案非常相似

用于光刻的阿拉伯酸和硝酸等

光刻

事件是 1952 年由 jay

lathrop 和 james nall

在今天的陆军

研究

实验室的前身发明

接近熔断器

等光刻是一个

涉及选择性打开或

关闭半导体(通常是硅)表面的过程

,这与我们如何使用光刻

有选择地重新创建

图像非常相似,

想象切割蛋糕而不是

将其

切成八个均匀的切片 就像

走传统路线一样,

假设您想从蛋糕中间切出一个正方形

您可能会先追踪并切出轮廓

,然后小心地将其移除,

在蛋糕中间留下一个方形孔,

这基本上是 光刻是如何

工作的,但是

因为我们很难

尝试切割一个正方形 从

一块硅片中,我们把它留给

一个叫做面具的东西

作为你的刀,紫外线或

紫外线作为嘴巴,疯狂地吃掉

一块方形蛋糕,但你可能会

问什么是面具?

面具是什么?

以负空间的形式包含您的设计的东西,这

意味着如果您将手电筒通过

这个面具照射到墙上,

您将得到与皮影

木偶或光木偶相反的东西

,这将是您的设计

,而不是晶圆 慢慢地

被紫外线照射吃掉,面具有助于

保护

你想要保留的所有区域,

紫外线只能

穿过面具中的负空间

,所以基本上面具

有助于阻挡你不能进入的地方 想要

它去 或者

像对待整个蛋糕一样对待硅胶晶片说你想吃整个蛋糕

但你妈妈说绝对不要并且

限制你限制你

所以你只能吃方形

蛋糕我 在这种情况下,

您的母亲就是我们所说

的光刻掩模,

而您将是

贪婪地

吃掉方形蛋糕的嘴,而这

实际上

是该过程的关键步骤,一种称为光刻胶的关键材料

我们在硅片上铺一层

均匀的层

,它充当硅片和紫外光

之间的中间体

,所以有两种

光刻胶,一种是正的

,另一种是负的,但我们会坚持

正性光刻胶有助于

以负空间的形式雕刻您的设计,这

与您

整个蛋糕中

雕刻出

方形蛋糕的方式完全相同 暴露在

紫外线下,当然我有点过度简化了

这个过程,

在开始之前看到一般图片通常很有价值

受到特定细节的轰炸,

因此

您至少应该

从今天开始尝试摆脱的光刻的一般四步

过程如下:一种

表面处理,您将

晶片处理成多种材料,这些材料可以

驱除水分

,以促进两者之间的粘附

硅晶片和光刻胶,

因为光刻胶实际上是一种

不喜欢粘在

水上的有机材料,所以你也可能

在大约 100 摄氏度左右的热板上加热硅晶片,

使其进一步脱水两次

旋涂 我们使用

一种称为旋涂机

的设备在晶圆上旋

涂光刻胶 去除某些区域的

光刻胶,

以便您可以稍后蚀刻硅晶片,

因为实际上是

光刻胶 hy 实际上并没有蚀刻

腐蚀晶圆本身,而是

使用光刻胶进行蚀刻

,因此光刻实际上

为硅晶圆

准备了一个称为蚀刻的工艺,该工艺

实际上切掉了等厚

的光刻胶和硅晶圆,

以创建 硅晶片中的实际凹痕,

您可能还需要

在掩模上使用长通滤波器

以避免 t 形顶部,这是

由于

紫外线的衍射和反射而

形成 t 形的现象。 大量光刻胶以

清除

四个显影剂,

您可以通过将晶圆浸入

各种溶液中进行显影和清洁

,以冲洗掉任何多余的光刻胶

,实际上这一步涉及

在热板上进行曝光后烘烤,以观察以避免

由于

突然出现的应力裂纹 温度的变化等等,

恭喜

你,这一切都是为了创造出你自己的

大师 相当于光刻

石板 一个模具或

模板 包含您的电路设计,因此

您的硅晶片现在可以转移该

设计

复制它,就像光刻如何

复制您的油脂绘图

一样,为什么光刻法首先

所有这些硅晶片的重点是

光刻法

在制作马戏团方面比试图更有效地制作马戏团

手动镊子

电阻到面包板上

,再加上光刻技术,我们

可以更具体地创建越来越小的设备

芯片,几乎

不可能将更复杂的

实用性和功能

集成到它们微小的紧凑表面上

,因此这对于

创建

称为 mems 设备或微机电设备的设备特别有用

系统,例如微型

传感器 微型执行器 微型

电子设备和微型结构,

它们足够小,可以

进行小型挤压并堆叠到越来越

小的空间中,

这就是苹果每年都在努力

使手机更薄

的原因,芯片上的实验室怎么样?

内存设备

船上的实验室利用了某些

流体,正如它的名字所暗示的那样,

它是一个系统,将多种

实验室技术

应用于一个只有几平方厘米左右大小的小芯片上

,那么拉巴纳芯片如何

利用这些不同的

特性 这些特定的流体

井水在微观上实际上

与蜂蜜番茄酱和

血液在宏观上的作用相同,这是

我们在日常生活中习惯的技能,

而宏观上的水实际上

是一种 牛顿流体

意味着它的粘度

不受压力的影响,粘度

是流体流动的容易程度,

但是番茄酱

蜂蜜和血液都是

非牛顿流体的例子,

这意味着它的粘度

受到压力的影响

,你可以在挤压番茄酱时看到这一点

从一个塑料番茄酱瓶中

出来,它是如何源源不断地流出的,

它几乎就

像水一样变得越来越流动,

直到它开始溅起

当然,微观尺度的水

实际上就像非牛顿

流体一样,

这意味着它的粘度

受应力的影响,因此我们可以

使用与通常不同的技术

混合水 我们可以

通过称为扩散的过程混合水,其中

水的种类 从高

浓度区域移动到低浓度区域

有点像我们呼出的二氧化碳如何

扩散

到空气中,我们可以通过扩散来混合,

而不是

我们通常如何在称为湍流的过程中混合它,

例如我们如何

立即剧烈搅拌 将热巧克力粉放入

热水中以创建热巧克力

光刻实际上还有许多

其他应用,

两个光子光刻可以创建 3d

形状,

有时甚至是纳米级

,所以你可以看到这一点,因为

它几乎可以让我们创造一个

全新的维度 设计,

这实际上是一个

使用两个光子光刻重建的微型自由女神像

,你可以看到 tw o

光子

就在这里,光刻技术

还可以让我们创建适当的仿生

设计,

例如模仿壁虎 ct 的材料或

让蜥蜴爬上树木和墙壁的小刷毛,

但是在更远的未来

,这种相对较新的技术

在未来有什么潜力? 我们不断变化的

世界 值得注意的是,

光刻

技术是大多数纳米技术的基础,它使

我们能够探索新的想法,因为

我们创造越来越

小的设备的能力

增加了仍在探索的潜在想法,

包括可以

清洁阻塞动脉的纳米动脉机器人

将药物直接注射到

我们的血液中,从而

跳过外部注射的过程,

或者纳米胰岛素泵

可以插入到被诊断患有

糖尿病的人

体内并内部注射胰岛素,从而避免

了目前

外部胰岛素泵的麻烦,这些设备仍然

是您附加的笨重设备 在你的腰带上,这是一个

无尽的世界 sibility

有足够的时间耐心和研究

让我们来看看 bcis 到底是

什么 bcis

a bci 是大脑计算机接口的首字母缩写词,

顾名思义,它是连接大脑和计算机的接口,

它们代表旨在

交流的技术 使用中枢神经

系统

,如大脑、脊髓和

神经感觉视黄醇,

取决于这项技术的设计和意图,

我们可以记录和

解释神经信号,这些信号

旨在完成外部可能在计算机上的内部神经

动作

,所以如果患者有 一种

抑制其神经功能的疾病或创伤,

我们可以使用 bci 来帮助他们的大脑

并刺激神经活动,

结合人工智能和机器学习到

其他不断发展的领域

光刻可用于创建

越来越小的 bcis

,这可能会显着

增强他们的能力

和 我们将能够

为后代使用

这项技术 今天演讲的重点是向

大家介绍

推动纳米技术发展的基本过程

之一,该领域面临的障碍之一

是摩尔定律即将结束,

该定律指出,每两到两年

左右,我们将 能够将集成电路上的晶体管数量增加一倍,

这种

尺寸的缩小

不仅导致更快的运行速度,

而且还降低了能耗

,当然还有更高的器件密度

,这些都随着摩尔定律的放缓而消失,

原因是这种缩小是

达到其物理极限时

,芯片产生的热量

不会

随着我们缩小这些芯片的尺寸而减少相同的比例,

并且我们不可能

尝试足够快地冷却它们

以获得我们希望的处理收益

看到

这样的尺寸缩小,

进一步缩小设备也不会

降低能耗,

而且缺陷数量也在增加

随着我们不断尝试

使用我们当前的技术生产越来越小的设备,

对于那些仍未决定

职业道路的人来说,也许您可以将此

信息作为起点,

因为随着我们从高中毕业并

进入大学及以后,

我们将 那些在实验室和

教室里寻找克服

这一障碍的方法的人 我们将成为

寻找解决方案的人,

即使差异很小,

我们也将成为探索

纳米技术

平衡的人 像光刻这样的过程

冒险进入

规模不断缩小的世界

谢谢你